"signal performance of micromachined silicon inductive microphones"

(2007) "signal performance of micromachined silicon inductive microphones". Applied Acoustics, 68. pp. 1286-1296.

[img]
Preview
PDF
Microsoft_Word_-_Document3.pdf

Download (40kB) | Preview

Abstract

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Item Type: Article
Subjects: Electrical
Divisions: College Of Engineering Sciences > Electrical Engineering Dept
Depositing User: AYHAM ZAZA
Date Deposited: 30 Mar 2008 11:04
Last Modified: 01 Nov 2019 16:25
URI: http://eprints.kfupm.edu.sa/id/eprint/855