Large signal performance of micromachined silicon inductive microphones

(2007) Large signal performance of micromachined silicon inductive microphones. Applied Acoustics, 68 (10). pp. 1286-1296.

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Abstract

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Item Type: Article
Subjects: Electrical
Divisions: College Of Engineering Sciences > Electrical Engineering Dept
Depositing User: ANKAR (g200603940) (g200603940)
Date Deposited: 23 Mar 2008 09:23
Last Modified: 01 Nov 2019 16:24
URI: http://eprints.kfupm.edu.sa/id/eprint/543

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  • Large signal performance of micromachined silicon inductive microphones. (deposited 23 Mar 2008 09:23) [Currently Displayed]