(2007) Large signal performance of micromachined silicon condenser microphones. Applied Acoustics, 68 (6). pp. 616627.

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Abstract
A mathematical model for the opencircuit output voltage of a micromachined silicon condenser microphone with a single deeply corrugated diaphragm as a function of the applied acoustic pressure is presented. The model, basically a sineseries function, can easily yield closedform expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equalamplitude twotone acoustic pressure input is considered in detail. The results show that the microphone generates only oddorder harmonic and intermodulation products. The results also show that the amplitudes of these components are strongly dependent on the microphone parameters, the corrugation depth and the ratio between the halflength of the diaphragm and its thickness. Moreover, the results show that the acoustic pressure required to produce a prespecified output opencircuit voltage is strongly dependent on these parameters.
Item Type:  Article 

Subjects:  Electrical 
Department:  College of Engineering and Physics > Electrical Engineering 
Depositing User:  ANKAR (g200603940) (g200603940) 
Date Deposited:  23 Mar 2008 06:24 
Last Modified:  01 Nov 2019 13:24 
URI:  http://eprints.kfupm.edu.sa/id/eprint/542 