"Large signal performance of micromachined silicon inductive microphones"

"Large signal performance of micromachined silicon inductive microphones". In: IEEE International Conference on Industrial Technology, December 14-17, 2005, Hong Kong, China.


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A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Item Type: Conference or Workshop Item (Paper)
Subjects: Electrical
Department: College of Engineering and Physics > Electrical Engineering
Depositing User: Mr. Tamim Tamim
Date Deposited: 11 Jun 2008 08:31
Last Modified: 01 Nov 2019 13:27
URI: https://eprints.kfupm.edu.sa/id/eprint/1720