Large signal performance of micromachined silicon inductive microphones

(2005) Large signal performance of micromachined silicon inductive microphones. Industrial Technology, 2005. ICIT 2005. IEEE International conference, 1.

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Abstract

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Item Type: Article
Subjects: Computer
Divisions: College Of Engineering Sciences > Electrical Engineering Dept
Depositing User: Mr. Admin Admin
Date Deposited: 24 Jun 2008 16:25
Last Modified: 01 Nov 2019 17:04
URI: http://eprints.kfupm.edu.sa/id/eprint/14179