(2005) Large signal performance of micromachined silicon inductive microphones. Industrial Technology, 2005. ICIT 2005. IEEE International conference, 1.
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Abstract
A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.
| Item Type: | Article |
|---|---|
| Subjects: | Computer |
| Department: | College of Engineering and Physics > Electrical Engineering |
| Depositing User: | Mr. Admin Admin |
| Date Deposited: | 24 Jun 2008 13:25 |
| Last Modified: | 01 Nov 2019 14:04 |
| URI: | http://eprints.kfupm.edu.sa/id/eprint/14179 |