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Large signal performance of micromachined silicon inductive microphones

Abuelma’atti, M.T. (2007) Large signal performance of micromachined silicon inductive microphones. Applied Acoustics, 68 (10). pp. 1286-1296.

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Abstract

A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.



Item Type:Article
Date:October 2007
Date Type:Publication
Subjects:Electrical
Divisions:College Of Engineering Sciences > Electrical Engineering Dept
Creators:Abuelma’atti, M.T.
Email:mtaher@kfupm.edu.sa
ID Code:543
Deposited By:ANKAR (g200603940) (g200603940)
Deposited On:23 Mar 2008 09:23
Last Modified:12 Apr 2011 13:05

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