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Large signal performance of micromachined silicon inductive microphones

Abuelma’atti, M.T. (2005) Large signal performance of micromachined silicon inductive microphones. Industrial Technology, 2005. ICIT 2005. IEEE International conference, 1.

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A mathematical model for the open-circuit output voltage of a micromachined silicon inductive microphone is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that, the microphone generates both even and odd-order harmonic and intermodulation products.

Item Type:Article
Date:December 2005
Date Type:Publication
Divisions:College Of Engineering Sciences > Electrical Engineering Dept
Creators:Abuelma’atti, M.T.
ID Code:14179
Deposited By:KFUPM ePrints Admin
Deposited On:24 Jun 2008 16:25
Last Modified:12 Apr 2011 13:14

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